Radiation detector with defective pixels prevention structure

摘要

Provision is a radiation detector that allows eliminating short between electric wires crossing over each other via an interlayer insulating layer and thus suppression of defective detecting elements. A construction of this embodiment has a design idea that eliminates short between electric wires of an amorphous selenium layer and an active matrix substrate. Specifically, the electric wires are in a position covered with a thick center portion of the amorphous selenium layer. This ensures to separate the electric wires away from an electrode layer, achieving provision of a radiation detector capable of being used for a long period of time.

主权项

1. A radiation detector comprising:
a matrix substrate arranged two-dimensionally and configured to read out signals from each of detecting elements; a semiconductor layer configured to generate carriers upon incidence of radiation; and an electrode layer configured to apply voltage, the matrix substrate, the semiconductor layer, and the electrode layer being laminated in this order, the semiconductor layer comprising a center portion with a layer thickness under the electrode layer and a tapered end portion thinner than the center portion, the matrix substrate comprising electric wires which cross each other, wherein a crossing portion where the electric wires cross each other when seen from the semiconductor layer is disposed in a position covered with the center portion of the semiconductor layer except for a position covered with the end portion.