Automatic filtering of SEM images

摘要

A method, system, and computer program product to automatically evaluate a scanning electron microscope (SEM) image are described. The method includes obtaining a source image and the SEM image taken of the source image. The method also includes evaluating the SEM image based on comparing source contours extracted from the source image and SEM contours extracted from the SEM image to determine whether the SEM image passes or fails.

主权项

1. A system to obtain and evaluate a scanning electron microscope (SEM) image, the system comprising:
a scanning electron microscope (SEM) to obtain the SEM image from a patterned source; a processor configured to evaluate the SEM image based on a source image obtained without the SEM from the patterned source by comparing source contours extracted from the source image with SEM contours extracted from the SEM image; and an output device configured to output evaluation information to a user.