Probe with cantilevered beam having solid and hollow sections

摘要

An electrically conductive probe can comprise a post to which a beam structure is attached. The beam structure can comprise a cantilevered portion that extends away from the post to a free end to which a contact structure can be attached. The cantilevered portion of the beam can include both a solid section and a hollow section. Multiple such probes can be used in a test contactor to make electrical connections with an electronic device such as a semiconductor die or dies to be tested.

主权项

1. An electrical probe comprising:
an electrically conductive post disposed on a first axis passing through a first end and a second end of said post; an electrically conductive beam structure comprising an attachment portion attached directly to said second end of said post and a free cantilevered portion extending directly away from said attachment portion along a second axis that is substantially perpendicular to said first axis, wherein:
said cantilevered portion of said beam comprises a solid section and a hollow section,a length of said solid section is at least fifteen percent of a length of said cantilevered portion,a length of said hollow section is at least fifteen percent of said length of said cantilevered portion, andsaid solid section is disposed between said attachment portion and said hollow section.