Self-conditioning polishing pad and a method of making the same

摘要

The present invention is directed to a self-conditioning polishing pad. The self-conditioning polishing pad comprises an insoluble polymeric foam matrix and insoluble polymeric foam particles within the foam matrix. The particles are coated with a water-soluble component over a portion of the surface area of the particle. The particles may have a diameter in the range of 5 to 1000 microns in diameter.

主权项

1. A polishing pad comprising:
an insoluble polymeric foam matrix; and a plurality of coated particles, wherein said plurality of coated particles each comprise insoluble polymeric foam particles coated with a water-soluble component, wherein said insoluble polymeric foam particles are coated over about 5% to 90% of the surface area of said insoluble polymeric foam particles with the water-soluble component in order to provide an effective bond between the insoluble polymeric foam matrix and the insoluble polymeric foam particles.