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发明名称
IMMERSION LITHOGRAPHIC APPARATUS, DRYING DEVICE, IMMERSION METROLOGY APPARATUS AND DEVICE MANUFACTURING METHOD
摘要
<p>예를 들어, 노광시 라인을 따라 배치되고 라인에 대해 기울어진 복수의 기다란 슬롯들을 통해 기판으로부터 액체를 제거하도록 액체 제거 디바이스가 배치되는 침지 리소그래피 장치가 개시된다. 액체 제거 디바이스는 침지 후드 내의 메니스커스 피닝 디바이스(meniscus pinning device)로서 작용할 수 있으며, 또는 기판으로부터 방울을 제거하기 위해 건조 디바이스에서 사용될 수 있다.</p>
申请公布号
KR101527502(B1)
申请公布日期
2015.06.09
申请号
KR20110034653
申请日期
2011.04.14
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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