System for attachment of an electrode into a plasma source

摘要

An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.

主权项

1. A system for removable attachment of an electrode to a plasma source, comprising:
a plasma source having a reaction chamber; an interface layer attached to the reaction chamber; a mounting ring affixed to the interface layer; and a source electrode removably attached to the mounting ring, the combination of the interface layer, mounting ring and source electrode forming a heat conductive seal between the reaction chamber attaching portion and the source electrode.