Radiation generator having bi-polar electrodes

摘要

A radiation generator includes an insulator, with an ion source carried within the insulator and configured to generate ions and indirectly generate undesirable particles. An extractor electrode is carried within the insulator downstream of the ion source and has a first potential. An intermediate electrode is carried within the insulator downstream of the extractor electrode at a ground potential and is shaped to capture the undesirable conductive particles. In addition, a suppressor electrode is carried within the insulator downstream of the intermediate electrode and has a second potential opposite in sign to the first potential. A target is carried within the insulator downstream of the suppressor electrode. The extractor electrode and the suppressor electrode have a voltage therebetween such that an electric field generated in the insulator accelerates the ions generated by the ion source toward the target.

主权项

1. A radiation generator comprising:
an insulator; a ion source carried within the insulator and configured to directly generate ions and indirectly generate undesirable particles; a plurality of extractor electrodes, a first extractor electrode of the plurality of extractor electrodes carried within the insulator downstream of the ion source and having a first potential, and a second extractor electrode of the plurality of extractor electrodes carried within the insulator downstream of the ion source and having a second potential, wherein the first extractor electrode terminates farther downstream from the ion source than the second extractor electrode, and wherein the first potential is closer to ground than the second potential; an intermediate electrode carried within the insulator downstream of the extractor electrodes and being shaped to capture at least some of the undesirable particles; a suppressor electrode carried within the insulator downstream of the intermediate electrode and having a third potential opposite in sign to the first potential and the second potential; the intermediate electrode being at an intermediate potential between the first and third potential; and a target carried within the insulator downstream of the suppressor electrode; the extractor electrodes and the suppressor electrode having a voltage therebetween such that an electric field generated in the insulator accelerates the ions generated by the ion source toward the target.