发明名称 Dual containment system having coaxial flexible tubes for transporting a fluid through a “rolling loop” cable duct
摘要 Disclosed are systems and methods for a fluid transportation system having a first flexible tube with an inner wall. The fluid transportation system also has a second flexible tube with an outer wall. The second tube is located inside the first tube and a standoff is located between the inner wall of the first tube and the outer wall of the second tube. The first flexible tube is configured to transport a first fluid and the second flexible tube is configured to transport a second fluid. The first and second flexible tubes are configured such that the first fluid isolates the second fluid from an ambient environment, and the first fluid can be monitored for leakage.
申请公布号 US9052616(B2) 申请公布日期 2015.06.09
申请号 US201012915632 申请日期 2010.10.29
申请人 ASML Holding N.V. 发明人 Rodak Daniel Paul
分类号 G03F7/20 主分类号 G03F7/20
代理机构 Sterne, Kessler, Goldstein & Fox P.L.L.C 代理人 Sterne, Kessler, Goldstein & Fox P.L.L.C
主权项 1. A fluid transportation system comprising: a first flexible tube having an inner wall and configured to transport a first fluid; a second flexible tube having an outer wall and configured to transport a second fluid, wherein the second tube is located inside the first tube; a standoff located between the inner wall of the first tube and the outer wall of the second tube; a distribution device comprising: a chamber comprising chamber walls that are configured to define a path for a flow of the first fluid through the distribution device, wherein the second end of the first flexible tube is coupled to the chamber and the first flexible tube is located external to the chamber,a first fluid port configured to provide an opening for the first fluid to enter the chamber, anda second fluid port, located external to the first fluid port, configured to provide an opening for the second fluid to enter the second flexible tube; and a manifold including: a first portion that is located inside the chamber, wherein the second end of the second flexible tube is coupled to the manifold and the second flexible tube is located external to the chamber; anda second portion that is located outside the chamber.
地址 Veldhoven NL