发明名称 |
Driving substrate and display device |
摘要 |
A driving substrate includes: a protective layer including an etching surface; and a film layer including one or more convex portions on a surface thereof. The film layer is in contact with a rear surface of the protective layer. The one or more convex portions each have a surface being flush with the etching surface. |
申请公布号 |
US9054049(B2) |
申请公布日期 |
2015.06.09 |
申请号 |
US201414246802 |
申请日期 |
2014.04.07 |
申请人 |
Sony Corporation |
发明人 |
Masuda Kenta;Akamatsu Keiichi;Kato Yuichi |
分类号 |
H01L21/3105;H01L27/12;H01L23/28 |
主分类号 |
H01L21/3105 |
代理机构 |
Sony Corporation |
代理人 |
Sony Corporation |
主权项 |
1. A planarizing method comprising:
forming a substrate by providing a protective layer on a film layer, wherein the film layer comprises one or more convex portions on a surface thereof, and the film layer and the protective layer have substantially same etching resistance; and planarizing a surface of the substrate by etching the one or more convex portions of the film layer together with the protective layer. |
地址 |
Tokyo JP |