发明名称 Driving substrate and display device
摘要 A driving substrate includes: a protective layer including an etching surface; and a film layer including one or more convex portions on a surface thereof. The film layer is in contact with a rear surface of the protective layer. The one or more convex portions each have a surface being flush with the etching surface.
申请公布号 US9054049(B2) 申请公布日期 2015.06.09
申请号 US201414246802 申请日期 2014.04.07
申请人 Sony Corporation 发明人 Masuda Kenta;Akamatsu Keiichi;Kato Yuichi
分类号 H01L21/3105;H01L27/12;H01L23/28 主分类号 H01L21/3105
代理机构 Sony Corporation 代理人 Sony Corporation
主权项 1. A planarizing method comprising: forming a substrate by providing a protective layer on a film layer, wherein the film layer comprises one or more convex portions on a surface thereof, and the film layer and the protective layer have substantially same etching resistance; and planarizing a surface of the substrate by etching the one or more convex portions of the film layer together with the protective layer.
地址 Tokyo JP