Fine particle measurement system

摘要

A fine particle measurement system including a primary-side power supply circuit connected to a primary side of an isolation transformer, a control circuit configured to control the primary-side power supply circuit, a first current measurement circuit configured to transmit to the control circuit a first signal indicating a first current that flows from a trapping unit toward a secondary-side reference potential line, and a second current measurement circuit configured to transmit to the control circuit a second signal indicating a second current corresponding to the amount of ions that are not trapped by the trapping unit. The control circuit adjusts the electrical power supplied to the ion generating unit based on the first current and measures the amount of the fine particles in the gas based on the second current. Further, the first current measurement circuit includes an isolation amplifier and amplifies the first signal via the isolation amplifier and transmits the first signal to the control circuit.

主权项

1. A fine particle measurement system comprising:
an ion generating unit configured to generate ions by corona discharge, and a charging chamber configured to charge at least a part of fine particles present in a gas with said ions; a trapping unit in communication with the charging chamber, and configured to trap at least a part of the generated ions that do not electrically charge the fine particles; an isolation transformer configured to transform a voltage used for generating the corona discharge, the isolation transformer comprising a secondary side connected to the ion generating unit; a primary-side power supply circuit connected to a primary side of the isolation transformer, and capable of changing a voltage supplied to the isolation transformer; a control circuit connected to the primary-side power supply circuit, and configured to control the primary-side power supply circuit so as to adjust a current supplied to the ion generating unit; a first current measurement circuit connected to each of a secondary-side reference potential line of a secondary side of the isolation transformer, the trapping unit and the control circuit, and configured to transmit to the control circuit a first signal indicating a first current that flows from the trapping unit toward the secondary-side reference potential line; and a second current measurement circuit connected to each of a primary-side reference potential line of a primary side of the isolation transformer, the secondary-side reference potential line and the control circuit, and configured to transmit to the control circuit a second signal indicating a second current that is obtained based on a potential difference between the primary-side reference potential line and the secondary-side reference potential line, the second current corresponding to an amount of ions that are not trapped by the trapping unit, wherein the control circuit is configured to adjust the current supplied to the ion generating unit to a desired value in accordance with the first current, and to measure the amount of the fine particles in the gas in accordance with the second current, and wherein the first current measurement circuit comprises an isolation amplifier and is configured to amplify the first signal via the isolation amplifier to transmit the first signal to the control circuit.