Surface planarisation

摘要

This invention generally relates to planarisation of a surface of a substrate. In an embodiment of planarising a surface region of a substrate, the substrate having a body on a portion of said surface region, the method comprises: modifying the wetability of a surface of said body with respect to a liquid planariser composition by providing a surface modifying layer such as a self-assembled monolayer thereon; and then depositing the liquid planariser composition on said substrate and said body such that the planariser composition wets said surface region, wherein said surface modifying layer determines a contact angle of said liquid planariser composition to said surface of said body such that the deposited liquid planariser composition is repelled from said surface of said body.

主权项

1. A method of planarizing a surface region of a substrate, said substrate having a body on a portion of said substrate surface region, wherein said substrate is transmissive to light of a predetermined wavelength and said body is substantially opaque to light of said predetermined wavelength, the method comprising:
depositing negative tone photosensitive composition on said substrate surface region and on at least a portion of said body; illuminating said negative tone photosensitive composition through said transmissive substrate using light of said predetermined wavelength such that said body portion masks said negative tone photosensitive composition deposited on said body portion; developing said illuminated negative tone photosensitive composition to substantially remove said masked negative tone photosensitive composition from said body portion, while leaving said negative tone photosensitive composition on said substrate surface region, such that adjacent regions of said body portion and said negative tone photosensitive composition on said surface region have respective thicknesses to provide a substantially planar surface opposite said substrate surface region and extending across said adjacent regions.