Device for analising a radiating material using a microprobe

摘要

The invention relates to an analysis device comprising a main enclosure fitted with a secondary enclosure, a microprobe placed inside the main enclosure and fitted with an airlock and with a motion object, and a movable sample support that is movable from the secondary enclosure to the airlock and from the airlock to the motion object. Each of the airlock and the motion object includes a respective guide member for guiding the movable sample support and a respective sensor for detecting the presence of the movable sample support.

主权项

1. A device for analyzing a sample of a material with the help of a microprobe, the device comprising:
a main enclosure containing a secondary enclosure; a microprobe placed in the main enclosure and fitted with a motion object, the microprobe comprising:
an analysis chamber for receiving the samplea gun for bombarding the sample placed in the analysis chamber, with a beam, along an axis of the gun,a column for focusing the beam on the sample, andSpectrometers arranged to receive X-rays emitted by the sample during interaction between the beam and the material of the sample;the motion object comprising an XYZ-table serving to move a sample zone that is subjected to bombardment along two orthogonal axes of a plane perpendicular to the axis of the gun and also along that axis; an airlock (26) placed in the main enclosure and connected to the microprobe and to the secondary enclosure; and a movable sample support for supporting the sample, the sample support being movable from the secondary enclosure to the airlock and from the airlock to the motion object; each of the airlock and the motion object including a respective member for guiding the movable sample support to guide the support while it is being moved, and also a respective sensor for detecting the presence of the movable sample support.