Stylus abrasion detection method and surface property measurement device

摘要

A stylus abrasion detection method includes obtaining a measurement curve of a standard specimen in which an unevenness that changes periodically is formed on a surface, by causing a stylus to trace along the surface of the standard specimen, detecting a displacement of the stylus in a direction perpendicular to the tracing direction, and using the displacement for obtaining the measurement curve; performing a frequency analysis on the measurement curve; calculating an abrasion amount of the stylus from a result of the frequency analysis; and displaying the abrasion amount calculated by the abrasion amount calculation.

主权项

1. A stylus abrasion detection method that detects abrasion of a stylus with a surface property measurement device, the device causing a stylus to contact a surface of a measured object, while causing the stylus to trace the surface of the measured object by maintaining contact of the stylus against the surface, detecting a displacement of the stylus in a direction perpendicular to the tracing direction, and measuring a surface property of the measured object from the detected displacement amount of the stylus, the method comprising:
obtaining a measurement curve of a standard specimen in which a periodically-changing unevenness is formed on a surface, said obtaining the measurement curve comprising:
causing the stylus to trace the surface of the standard specimen;detecting a displacement of the stylus in a direction perpendicular to the tracing direction; andusing the displacement for obtaining the measurement curve; performing a Fast Fourier Transform frequency analysis on the measurement curve; calculating an abrasion amount of the stylus from a result of the frequency analysis by performing a filter process on the result of the frequency analysis such that only a wave height value shorter than an unevenness wave height value of the standard specimen remains; and displaying the abrasion amount calculated by the abrasion amount calculation.