Valve, fluidic apparatus, and fluid-supplying apparatus

摘要

A valve includes a valve body, a diaphragm dividing the inside of the valve body into first and second valve chambers and being displaced under a pressure of fluid, first and second openings in communication with the first valve chamber, and a third opening in communication with the second valve chamber. When a pump is not driven, the force applied to a side of the diaphragm facing the second valve chamber is greater than the force applied to a side of the diaphragm facing the first valve chamber, and the second opening is sealed by the diaphragm. When the pump is driven and the force applied to the side of the diaphragm facing the first valve chamber becomes greater than the force applied to the side of the diaphragm facing the second valve chamber, the diaphragm allows the first and second openings and to communicate with each other.

主权项

1. A fluidic apparatus comprising:
a differential-pressure-producing member; a valve body defined by a stack including a bottom plate, a plate member including a first valve chamber, a diaphragm, a plate member including a second valve chamber, and a top plate; a first opening provided in the valve body at a location of the valve body from which fluid flows in; a second opening provided in the valve body at a location of the valve body from which the fluid flows out; and a third opening provided in the valve body and into which differentiated fluid flows from a fluid source that is the same as that for the fluid flowing in through the first opening; wherein at least one of the first opening and the second opening is closed by the diaphragm; when a force applied by the fluid through the first opening to a front surface of the diaphragm differs from a force applied by the fluid through the third opening to a back surface of the diaphragm, the diaphragm is displaced and allows the first opening and the second opening to communicate with each other; the differential-pressure-producing member is defined by a pump including an inlet and an outlet; and the first opening is connected to the outlet of the pump and the third opening is connected to the inlet of the pump.