Method of manufacturing transparent conductive thin film

摘要

An embodiment of the disclosed technology discloses a transparent conductive thin film and a method of manufacturing the same. The embodiment of the disclosed technology employs tin (II) oxalate (Sn2C2O4) as a raw material, acetic acid and ammonia as complex agents to form a neutral complex system with a pH=6.5˜7.5, and trifluoroacetic acid as dopant to form a stable doping of F ions, and has a high doping efficiency.

主权项

1. A method of manufacturing a transparent conductive thin film, comprising:
adding Sn2C2O4 into an aqueous solution of acetic acid and then performing stirring to form a suspend system; adding ammonia into the suspend system, and then performing stirring to form a clear solution, wherein a pH value of the clear solution is in the range of 6.5 to 7.5; adding trifluoroacetic acid into the clear solution, and then performing stirring to form a sol system containing fluorine ion; and coating the sol system containing fluorine ions on a substrate, and then sequentially performing a dry process and a heat treatment process to form a SnO2:F thin film on the substrate, wherein the treatment temperature of the heat treatment process is 300° C., and the treatment time period of the heat treatment process is 5 min.