Moving mechanism, robot hand, electronic component transport device, electronic component inspection device, liquid feed pump, printing device, projection device, and transport device

摘要

A moving mechanism includes a support, a moving body arranged movably in a predetermined direction relative to the support, a first groove provided in the support parallel to the moving direction, a second groove provided in the moving body parallel to the moving direction, and facing the first groove, and a vibrating body arranged in the support or moving body and biased to press the other of the moving body or the support. A direction which the first groove and the second groove face each other intersects a direction which the support and the moving body face each other, and a biasing direction which the vibrating body is biased intersects the direction which the first groove and the second groove face each other and the direction which the support and the moving body face each other. Accordingly, backlash of the moving body with respect to the support is suppressed.

主权项

1. A moving mechanism comprising:
a support; a moving body which moves in a predetermined moving direction with respect to the support; a pair of first grooves which are provided on the support and formed parallel to the moving direction; a pair of second grooves which are provided on the moving body and face the first grooves; a plurality of rolling bodies which are provided between the first grooves and the second grooves, and roll in accordance with movement of the moving body; two rows of moving shafts which include the rolling bodies rolling between the first grooves and the second grooves, and are parallel to the moving direction, the two rows of the moving shafts are separated from each other in a direction intersecting a direction in which the support and the moving body face each other; and a vibrating body which includes a piezoelectric material generating vibration and is supported by one of the support and the moving body while being biased toward the other one of the support and the moving body, wherein a direction in which the first grooves and the second grooves face each other intersects the direction in which the support and the moving body face each other, and the positional relationship between the first grooves and the second grooves is reversed between the two rows of moving shafts, and a biasing direction in which the vibrating body is biased is inclined with respect to a moving surface including the two rows of moving shafts.