| 摘要 |
<p>The present invention relates to a fixating chuck using a Lorentz force. The purpose of the present invention is to allow an attachment and a detachment of a fixating target with a use of the Lorentz force. To achieve this, in accordance to an embodiment of the present invention, the fixating chuck using the Lorentz force comprises: a target plate having a base plate placed on a first surface, an electrode part formed on the surrounding area of the first surface, and a planar coil formed on a central area of the first surface to electrically be connected to the electrode part; and a step of which a second surface of the target plate opposed to the first surface is attached which has a permanent magnet inside to be adjacent to the second surface. The Lorentz force is generated between a planar coil and the permanent magnet in accordance with a direction of a current supplied from the electrode part to the planar coil, and the target plate is attached or detached from the stage in accordance with the direction of the Lorentz force.</p> |
