LASER HOLOGRAPHIC LITHOGRAPHY DEVICE AND METHOD OF MANUFACTURING FOR SIZE-GRADIENT NANO-PATTERN USING THE SAME

摘要

For a laser holographic lithography device and a method of manufacturing a size-gradient nanopattern using the same, a laser holographic lithography device includes a laser beam source, a space filer which removes the noise of the laser beam emitted from the laser beam source and expands beam size at the same time, a wafer stage which can emits expanded laser beam from the space filter and has a wafer holder and a back mirror, and a variable density filter which is located on the wafer holder, and transmits a first parallel ray emitted from the space filter and a second parallel ray emitted from the back mirror.