| 摘要 |
PROBLEM TO BE SOLVED: To provide a straightness calibration device capable of calibrating a measurement error due to the straightness of the movement of a moving part. ! SOLUTION: A straightness calibration device 20 includes: reference device information acquisition means 24 for acquiring a Y axis positional information on a straight face 22a based on the Y axis positional information acquired by measuring the straight face 22a of a reference device 22 by detection means 16 with a moving part 14 moved in a X axis direction for each position of a X axis, and the Y axis positional information acquired by measuring the straight face 22a by the detection means 16 with the moving part 14 moved in the X axis direction after inversion of the straight face 22a; measurement instrument information acquisition means 26 for acquiring the Y axis positional information of the moving part 14 by comparing the Y axis positional information acquired by measuring the straight face 22a by the detection means 16 for each pos |
