| 发明名称 |
ELECTRON INJECTOR AND FREE ELECTRON LASER. |
| 摘要 |
An injector arrangement for providing an electron beam. The injector arrangement comprises a first injector for providing electron bunches, and a second injector for providing electrons bunches. The injector arrangement is operable in a first mode in which the electron beam comprises electron bunches provided by the first injector only and a second mode in which the electron beam comprises electron bunches provided by the second injector only. |
| 申请公布号 |
NL2013885(A) |
申请公布日期 |
2015.06.08 |
| 申请号 |
NL20142013885 |
申请日期 |
2014.11.27 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
NIKIPELOV ANDREY ALEXANDROVICH;BANINE VADIM YEVGENYEVICH;JAGER PIETER WILLEM HERMAN;VRIES GOSSE CHARLES;FRIJNS OLAV WALDEMAR VLADIMIR;GRIMMINCK LEONARDUS ADRIANUS GERARDUS;KATALENIC ANDELKO;AKKERMANS JOHANNES ANTONIUS GERARDUS;LOOPSTRA ERIK ROELOF;ENGELEN WOUTER JOEP;BARTRAIJ PETRUS RUTGERUS;COENEN TEIS JOHAN;ROOT WILHELMUS PATRICK ELISABETH MARIA |
| 分类号 |
G03F7/20;H01S3/00 |
主分类号 |
G03F7/20 |
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