| 摘要 |
PROBLEM TO BE SOLVED: To prevent damage on an object by foreign material in checking seating of the object. ! SOLUTION: An object fixing device 100 includes a receiving part 101, a press part 103 which presses an object W to the receiving part 101, a first drive part 104 which generates first force to the press part 103, a second drive part 105 which is arranged separately from the first drive part 104 and generates second force smaller than the first force to the press part, and a foreign material detection part 113 which detects foreign material interposed between the object W and the receiving part 101 while the press part 103 presses the object W to the receiving part 101 by the second drive part 105. ! COPYRIGHT: (C)2015,JPO&INPIT |
