| 摘要 |
<p>The present invention provides a substrate transport unit. The substrate transport unit according to an embodiment of the present invention comprises: a plurality of shafts rotatably disposed in parallel with each other and arranged along a direction along which a substrate is transported; and a plurality of rollers installed on the outer circumferential surfaces of the shafts to rotate with the shafts and contact the lower surface of the substrate. The outer diameters of the rollers disposed on the ends of the shafts are larger than the outer diameters of the rollers disposed on middle portions of the shafts.</p> |
