| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide capable of reducing interlayer peeling, burr generation, and warpage. ! SOLUTION: An optical waveguide comprises: a lower substrate 11; a lower clad layer 11 provided on the lower substrate 11; a core pattern 13 provided on the lower clad layer 12; an upper clad layer 14 provided on the core pattern 13; an upper substrate 15 provided on the upper clad layer 14; and a groove 17 which includes a groove formation surface 18 communicating with the upper substrate 15, the upper clad layer 14, and the core pattern 13 and in which at least a part of the groove formation surface 18 functions as an optical path conversion mirror 19 which converts an optical path of the optical signal passing the core pattern 13. ! COPYRIGHT: (C)2015,JPO&INPIT |
