| 摘要 |
PROBLEM TO BE SOLVED: To heighten removal capacity of adhered objects to a washing object having an open hole formed thereon. ! SOLUTION: A washing agent is injected from an injection port 26 to a metal mask 16 having an open hole 18, and the washing agent is sucked from a suction port 30 provided on the opposite side of the metal mask 16 with respect to the injection port 26. ! COPYRIGHT: (C)2015,JPO&INPIT |
