| 摘要 |
PROBLEM TO BE SOLVED: To provide an electret power generation device which widens a dynamic range with respect to an amplitude of an electrode and is capable of obtaining great output from a small amplitude to a large amplitude, and a manufacturing method thereof. ! SOLUTION: The electret power generation device includes: a portion of an overlap area variable generator in which a first fixed electrode 12 and a first vibrating electrodes 16 are included, an electret is formed on at least one of opposing electrode surfaces and power is generated by varying an overlap area; a portion of an inter-electrode distance variable generator in which a second fixed electrode 18 and a second vibrating electrode 20 are included, an electret is formed on at least one of opposing electrode surfaces and power is generated by varying an opposing distance between the electrode surfaces. A ratio of an area occupied by the overlap area variable generator and a total sum of areas occupied by the overlap area variable generator |
