SUBSTRATE INSPECTION APPARATUS AND METHOD

摘要

According to the present invention, a substrate inspection device is disclosed. More specifically, the present invention relates to a substrate inspection device and a method, detecting a foreign substance generated in a manufacturing process of a thin film substrate used for a flat plate display device to improve reliability of the substrate. According to an embodiment of the present invention, a substrate wherein a second passivation film is formed is stored in a glove box to be performed by twice shooting steps as maintaining an N2 environment, thereby accurately determining a foreign substance inflow defect causing a real moisture permeability defect, not a simple defect. Thus, reliability of a display device can be improved.