发明名称 WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter that can spectrally divide light in a wide area while maintaining high resolution, and to provide an optical module and electronic equipment. ! SOLUTION: A wavelength variable interference filter 5 includes a plurality of filter units 50 each having a pair of reflection films 54, 55 opposing to each other and a gap varying unit for varying a gap between the pair of reflection films 54, 55. The plurality of filter units 50 is two-dimensionally arranged on a layout plane parallel to the reflection surfaces of the reflection films 54, 55. When the filter is observed in a predetermined direction (first direction V) along the layout plane, two pairs of reflection films 54, 55 adjoin to each other at a predetermined interval on a first virtual line L1 intersecting the predetermined direction (first direction V), and reflection films 54, 55 of another filter unit 50C arranged at a position different from positions on the first virtual line
申请公布号 JP2015106107(A) 申请公布日期 2015.06.08
申请号 JP20130248931 申请日期 2013.12.02
申请人 SEIKO EPSON CORP 发明人 SANO AKIRA ; MAKIGAKI TOMOHIRO ; SAKURAI KAZUNORI
分类号 G02B26/00;B81B3/00;G01J3/26 主分类号 G02B26/00
代理机构 代理人
主权项
地址