| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave filter capable of reducing parasitic capacitance generated between lower layer wiring and upper layer wiring.SOLUTION: The surface acoustic wave filter includes a piezoelectric substrate 20, lower layer wiring 60, upper layer wiring 70, and an interlayer insulating film 80. The lower layer wiring 60 is provided on the piezoelectric substrate 20. The upper layer wiring 70 intersects the lower layer wiring 60. The potential of the upper layer wiring 70 is different from that of the lower layer wiring 60. The interlayer insulating film 80 is provided between the lower layer wiring 60 and the upper layer wiring 70. In a cross-sectional view along a direction in which the lower layer wiring 60 extends, the interlayer insulating film 80 has a portion having a width W2 equal to or less than the width W1 of the upper layer wiring 70. |
