| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a drawing device which performs multi-gradation control of the irradiation amount by using a plurality of beams so as to be able to suppress, without the use of a spare beam, reduction in drawing precision caused by a defective beam.SOLUTION: A drawing device for drawing a pattern on a substrate with the use of a plurality of beams comprises: a beam control unit 24 for controlling the plurality of beams for each of a plurality of beam groups which are smaller in number than the plurality of beams; and an instruction unit 23 which gives an instruction to the beam control unit 24. The instruction unit 23 adjusts the combination of the beam groups used for drawing at a certain position on the substrate and gives the instruction on the basis of information on a defective beam among the plurality of beams.</p> |
