| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator capable of suppressing the occurrence of a fatigue failure of a junction due to tensile stress, and a mass flow controller including the mass flow controller. ! SOLUTION: A piezoelectric actuator 1 includes: a piezoelectric element 2; a substrate 3 having an upper surface in contact with the lower surface of the piezoelectric element 2; a lid 4 having a lower surface in contact with the upper surface of the piezoelectric element 2; and a tube body 5 having a lower end joined with the substrate 3 and an upper end joined with the lid 4. The tube body 5 is provided with a plurality of grooves 51 in a circumferential direction thereof, and a thickness t1 of the tube body in at least one groove 50 among the plurality of grooves 51 is thinner than a thickness t2 of the tube body at the upper end 52. ! COPYRIGHT: (C)2015,JPO&INPIT |
