PHOTODETECTOR INCLUDED MICROCHANNELPLATE, METHOD FOR DETECTING PHOTO, ANALYSIS SYSTEM FOR ANALYZING SAMPLE AND METHOD THEREOF

摘要

The present invention relates to a photodetector having a microchannel plate, a sample analysis system using the same, a photodetection method using the same, and a sample analysis method using the same, and more specifically, to a photodetector which detects light emitted from a sample when an electronic beam is injected into the sample by an electronic gun. The photodetector having a microchannel plate according to the present invention comprises: a window formed from BaF2 and through which the light emitted from the sample is transmitted to emit transmitted light; a microchannel plate into which the transmitted light emitted from the window enters and formed in a Chevron pattern to emit secondary electrons in pulse form; a voltage application unit to apply a voltage of 2 kV to the microchannel plate to accelerate the secondary electrons; a coating layer formed from KBr and disposed on one side of the microchannel plate into which the transmitted light enters to induce the emission of the secondary electrons; a shield formed in a hollow pipe shape to dispose the window and the microchannel plate therein; a grid separated from a side of the window into which the light is injected to control the injected light to prevent the window from being positively polarized or negatively polarized; and a detection means to detect the secondary electrons in pulse form emitted from the microchannel plate.