| 摘要 |
The present invention relates to a data calculation method, a data calculation apparatus, and a defect inspection apparatus. According to the data calculation method, logic calculation of a plurality of run data groups is executed within a short period of time. The data calculation method includes: a run deployment process of deploying and storing a plurality of run data in an address space of a run deployment memory by adding a predetermined value to a value stored in an address of the run deployment memory corresponding to a beginning coordinate of run data and by executing data deployment manipulation, on each run datum, of deducting a predetermined value from a value stored in an address of the run deployment memory corresponding to an ending coordinate of the run data; a redundancy information acquisition process of acquiring redundancy information presenting a redundancy state of a plurality of the run data by executing scan manipulation, on each address of an address space, of recording the total sum of values stored on an 0-m^th address in the address space after finishing the run deployment process with respect to a m^th address in the address space; and a logic calculation process of executing logic calculation on the run data groups based on the redundancy information. |
