发明名称 |
A MICRO STAGE USING PIEZO ELEMENTS |
摘要 |
<p>The present invention relates to a micro stage and, more particularly, to a stage which is operated by using piezo elements which are used under vacuum. The micro stage is used as the stage with high precision like a micro level or a nano level for aligning columns like particle columns to require the high precision like a micro electronic column and moving a sample.</p> |
申请公布号 |
KR20150061730(A) |
申请公布日期 |
2015.06.05 |
申请号 |
KR20130145774 |
申请日期 |
2013.11.27 |
申请人 |
CEBT CO., LTD. |
发明人 |
KIM, BYENG JIN;KIM, HO SEOB |
分类号 |
H01J37/147;H02N2/02;H02N2/04 |
主分类号 |
H01J37/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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