发明名称 MAGNETRONS.
摘要 <p>A magnetron has a cathode, an anode with vanes, and an insulating surface which faces the cathode and receives material from the cathode due to sputtering at the cathode. A conductor enables the resistance of the film so deposited to be measured, giving an indication of the thickness of the film and the lifetime of the magnetron.</p>
申请公布号 FR2914486(B1) 申请公布日期 2015.06.05
申请号 FR20080051461 申请日期 2008.03.06
申请人 E2V TECHNOLOGIES UK LTD 发明人 BRADY MICHAEL BARRY CLIVE
分类号 H01J25/50;H01J23/02;H01J23/05;H01J23/12 主分类号 H01J25/50
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