发明名称 METHOD FOR ALIGNMENT OF SOLAR CELL SUBSTRATE AND METHOD FOR FABRICATING FINGER LINE ELECTRODE HAVING DOUBLE LAYER STRUCTURE USING THE SAME
摘要 <p>The present invention relates to an alignment method of a solar cell substrate and a method of forming a finger line electrode having a double layer structure using the alignment method, wherein the alignment method allows alignment assemblies each consisting of a plurality of alignment marks to be placed at each corner of a solar cell substrate, and allows a central point of the alignment marks constituting each alignment assembly and the alignment assembly to be recognized during an alignment process, thereby improving accuracy of the alignment. The alignment method of a solar cell substrate according to the present invention comprises the steps of: recognizing the position of each central point of alignment assemblies (hereafter, first central point position) before performing a unit process, wherein the alignment assemblies each consisting of three alignment marks are disposed at each corner of a solar cell substrate, the three alignment marks of each alignment assembly form the vertices of an equilateral triangle, and the center of the three alignment marks is the central point of the alignment assembly; recognizing a position of a central point of the alignment assembly (hereafter, second central point position) after performing the unit process; and determining whether the first central point position and the second central point position are matched to each other, and when not matched, arranging the substrate such that the second central point position is matched to the first central point position.</p>
申请公布号 KR101526812(B1) 申请公布日期 2015.06.05
申请号 KR20140117561 申请日期 2014.09.04
申请人 HYUNDAI HEAVY INDUSTRIES CO., LTD. 发明人 CHOI, KYUNG DEOK
分类号 H01L31/18;H01L31/0224;H01L31/042 主分类号 H01L31/18
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