METHOD OF MANUFACTURING FOR SUBSTRATE, SUBSTRATE, METHOD OF MANUFACTURING FOR ORGANIC ELECTRO LUMINESCENCE DEVICE AND ORGANIC ELECTRO LUMINESCENCE DEVICE

摘要

The present invention is to improve the extraction efficiency of light emitted to the outside by reducing the light which is absorbed and disappears on the interface of an organic electroluminescent device. The organic electroluminescent device is manufactured by forming a polymer layer (12) by coating a substrate (11) with a polymer, forming an uneven layer (13) with a plurality of uneven parts by applying ion impact stress due to plasma to the polymer layer (12), and successively forming a first electrode, an organic light emitting layer, and a second electrode on the substrate with the uneven layer. Also, a metal layer (23) is further formed on the upper side of the polymer layer. The metal layer is removed after the uneven part is formed by simultaneously applying thermal stress and the ion impact stress.