发明名称 MICROSTRUCTURE AND METHOD OF PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a microstructure and a method of producing the same, in particular, a nanoscale microstructure and a method of producing the same.SOLUTION: A method of producing a microstructure comprises: a first step of providing a carbon nanotube structure; a second step of suspending and placing the carbon nanotube structure; a third step of forming a carbon nanotube composite structure by forming a precoated layer on a surface of the carbon nanotube structure; a fourth step of transferring the carbon nanotube composite structure to a surface of a substrate, treating the carbon nanotube composite structure with a solvent, and attaching the carbon nanotube composite structure to the surface of the substrate; and a fifth step of removing the carbon nanotube structure by annealing the carbon nanotube composite structure at a temperature of 500°C to 700°C, where the precoated layer is softened and the softened precoated layer is contracted and concentrated to form spaced microstructure particles.
申请公布号 JP2015103797(A) 申请公布日期 2015.06.04
申请号 JP20140078426 申请日期 2014.04.07
申请人 QINGHUA UNIV;HON HAI PRECISION INDUSTRY CO LTD 发明人 JIN YUAN-HAO;YI GUN-GYONG;FAN SHOUSHAN
分类号 H01L33/44;B32B3/10;B82Y20/00;B82Y30/00;B82Y40/00 主分类号 H01L33/44
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