INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspection device and inspection method capable of accurately performing inspection.SOLUTION: The inspection device of an embodiment of the present invention includes: a light source 10 for lighting a sample having a pattern; a detector 11 for detecting light coming from the sample 30 lit by the light source; and a processor 50 for performing inspection on the basis of the correlation between the luminance value of a sample image acquired by the detector 11 and the surface shape of the sample 30 or the dimension in the height direction. The processor 50 performs the inspection on the basis of the addition value by weighting addition of the luminance values of sample images acquired in a plurality of imaging conditions.