| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of efficiently forming a homogeneous amorphous organic thin film utilized for an organic electroluminescent element or the like using an electrospray (ES) method. ! SOLUTION: Disclosed is an electrospray device for forming a thin film which forms the thin film by charging a solution obtained by dissolving an organic material into a solvent and spraying such a solution as fine droplets. In the inside of a nozzle in a spray part, a taper is formed which tapers off toward the tip, the inner diameter of the tip is 20 to 50 μm, and a gradient angle of the taper is 1° to 6°. ! COPYRIGHT: (C)2015,JPO&INPIT |
