WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC DEVICE

摘要

A wavelength variable interference filter includes a plurality of filter units each of which includes a pair of reflecting films facing each other and a gap changing unit changing an interval between the pair of reflecting films. The plurality of filter units are two-dimensionally disposed with respect to an arrangement surface parallel to a reflecting surface of the reflecting film, and reflecting films of other filter units disposed at locations different from those on a first virtual straight line, intersecting a predetermined direction (first direction) along the arrangement surface, are disposed so as to overlap a portion of the reflecting films on the first virtual straight line without gaps therebetween between two reflecting films adjacent with a predetermined interval therebetween along the first virtual straight line, when seen from the predetermined direction (first direction).

主权项

1. A wavelength variable interference filter comprising:
a plurality of filter units each of which includes a pair of reflecting films facing each other and a gap changing unit changing an interval between the pair of reflecting films, wherein the plurality of filter units are two-dimensionally disposed with respect to an arrangement surface parallel to a reflecting surface of the reflecting film, and reflecting films of other filter units disposed at locations different from those on a first virtual straight line, intersecting a predetermined direction along the arrangement surface, are disposed so as to overlap a portion of the reflecting films on the first virtual straight line without gaps therebetween between two reflecting films adjacent with a predetermined interval therebetween along the first virtual straight line, when seen from the predetermined direction.