| 发明名称 |
SCANNING MECHANISM AND SCANNING PROBE MICROSCOPE |
| 摘要 |
A scanning mechanism includes a movable portion to which a scanning target object is attached, and an X-Y actuator to scan the movable portion in an X direction and a Y direction perpendicular to the X direction. The X-Y actuator is symmetrical with respect to a straight line parallel to the Y direction and asymmetrical with respect to a straight line parallel to the X direction. |
| 申请公布号 |
US2015153385(A1) |
申请公布日期 |
2015.06.04 |
| 申请号 |
US201514614550 |
申请日期 |
2015.02.05 |
| 申请人 |
OLYMPUS CORPORATION |
发明人 |
SAKAI Nobuaki;UEKUSA Yoshitsugu |
| 分类号 |
G01Q10/00 |
主分类号 |
G01Q10/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A scanning mechanism to scan a scanning target object at high speed in an X direction and at low speed in a Y direction perpendicular to the X direction, comprising:
a movable portion to which the scanning target object is attached; and an X-Y actuator to scan the movable portion in the X direction and the Y direction, the X-Y actuator being symmetrical with respect to a straight line parallel to the Y direction and asymmetrical with respect to a straight line parallel to the X direction. |
| 地址 |
Tokyo JP |
