CLEANING APPARATUS

摘要

Apparatus for cleaning a workpiece to remove foreign matter sticking to the workpiece includes a chuck table having a holding surface for holding the workpiece and a cleaning unit provided so as to face the workpiece for spraying a cleaning fluid to clean the workpiece. The cleaning unit includes a cleaning nozzle having a nozzle hole for spraying the cleaning fluid toward the workpiece, and a water film forming nozzle having an annular slit formed so as to surround the nozzle hole of the cleaning nozzle. The annular slit sprays the cleaning fluid in the form of a film having a conical shape, and extends from the annular slit to the workpiece held on the chuck table. The cleaning fluid sprayed from the nozzle hole of the cleaning nozzle has a columnar shape surrounded by the cleaning fluid sprayed from the annular slit of the water film forming nozzle.

主权项

1. A cleaning apparatus for cleaning a workpiece to remove foreign matter sticking to said workpiece, comprising:
a chuck table having
a holding surface for holding said workpiece; and cleaning means provided so as to face said workpiece held on said holding surface of said chuck table for spraying a cleaning fluid to clean said workpiece; said cleaning means including:
a cleaning nozzle having a nozzle hole for spraying said cleaning fluid toward said workpiece held on said chuck table; anda water film forming nozzle having an annular slit formed so as to surround said nozzle hole of said cleaning nozzle, said annular slit functioning to spray said cleaning fluid in the form of a film having a conical shape and extending from said annular slit to said workpiece held on said chuck table; said cleaning fluid sprayed from said nozzle hole of said cleaning nozzle having a columnar shape surrounded by said cleaning fluid sprayed from said annular slit of said water film forming nozzle.