Method for Creating a Nano-Perforated Crystalline Layer

摘要

The present invention is a method of controlling the perforation of crystalline grains in a layer of material. The first step of the method creates at least one crystalline layer composed of multiple grains and at least one grain boundary. Next, a material covers the grain boundaries to create a protective, reinforcing coating on the crystalline layer. Finally, an etching process creates perforations in the grains while the grain boundaries are protected from etching by the coating.

主权项

1. A method of controlling the perforation of crystalline material during etching comprising the steps of:
creating at least one crystalline layer, wherein said at least one crystalline layer has a plurality of grains, wherein each of said plurality of grains has at least one grain boundary; coating said at least one grain boundary with a masking material to create a reinforcing mask on said at least one grain boundary, wherein said reinforcing mask reinforces said at least one crystalline layer; and etching a plurality of perforations into said at least one crystalline layer.