METHODS AND DEVICES FOR ANALYSING NANOSTRUCTURE ARRAY IMAGES

摘要

Methods and devices for analyzing nanostructure array imagesare disclosed. Imagesof arraysof nanostructuresare convertedto representationsin a coordinate system and the defectivity ofsaid array of nanostructuresis measured. Aspects of the methods include converting the image of the array of nanostructures to a representation in a coordinate system. Said conversion may comprise identifying a plurality of line structures in the image and generating a network of coordinates for each line structure. Then a reference defectivitymetric may be compared with an identified metric related to the nanostructure during said conversion of the image in said coordinate system. When the identified metric does not satisfy a condition of the reference defectivity metric, then the array of nanostructures may be considered defective.