| 摘要 |
This valve device comprises: a recess (22) provided in a flow path block (20); a diaphragm that, by covering the recess (22), forms a valve chamber (21) through which a fluid flows; an inflow port (23) that is opened in the recess (22) and that allows the fluid to flow into the valve chamber (21); and an NC outflow port (24) and an NO outflow port (25) that are opened in the recess (22) and that allow the fluid to flow out from the valve chamber (21). By shaking the diaphragm, the diaphragm tightly adheres to either a first valve seat (24b) formed by an opening (24a) of the NC outflow port (24) or a second valve seat (25b) formed by an opening (25a) of the NO outflow port (25), and thereby, the fluid in the valve chamber (21) flows out from the other outflow port. The recess (22) has a first inclined part (81) and a second inclined part (82), the depth of each of which gradually increases from the first valve seat (24b) and the second valve seat (25b), respectively, toward an inflow opening (23a) of the inflow port (23). |
