| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface analysis device capable of intelligibly displaying measurement result.SOLUTION: A surface analysis device 100 irradiates a sample with an electron beam or X-ray, detects an electron generated from the sample, and acquires a spectrum indicating the relationship between the kinetic energy and the detection intensity of the electron. The surface analysis device includes a detection depth calculation part 76 which calculates a detection depth of the detected electron based on the kinetic energy of the electron, and a display control part 78 which performs control causing a display part 82 to display the spectrum and information for the detection depth of the electron calculated by the detection depth calculation part 76. |
