发明名称 FILTER CLEANING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE MEDIUM
摘要 PROBLEM TO BE SOLVED: To clean a filter in a state attached to a predetermined position of a circulation line, while minimizing diffusion of pollutant to the circulation thereof when the pollutant exists in the filter.SOLUTION: A filter cleaning method includes a flashing liquid filling step for filling the inside of a filter (108) with flashing liquid, by supplying the flashing liquid only to a part of a circulation line (104) and to a tank (102), in a state where the filter is installed at a predetermined position of the circulation line, and a flashing liquid discharge step for draining the flashing liquid from the filter by discharging the flashing liquid thus supplied from a drain line connected with a part of the circulation line or the tank.
申请公布号 JP2015103662(A) 申请公布日期 2015.06.04
申请号 JP20130243124 申请日期 2013.11.25
申请人 TOKYO ELECTRON LTD 发明人 MIZOTA SHOGO;YABUTA TAKASHI;NONAKA JUN;KIYOSE HIROMI;NISHIMURA HIDEKI;UNO TAKASHI;NAKAZAWA TAKASHI
分类号 H01L21/304 主分类号 H01L21/304
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