| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a machine vision inspection system and method for obtaining an image with extended depth of field.SOLUTION: A method operates an imaging system of a machine vision inspection system to provide an extended depth of field (EDOF) image. The method comprises: (a) placing a work-piece in a field of view; (b) periodically modulating a focus position of the imaging system without macroscopically adjusting spacing between elements in the imaging system, over the plurality of focus positions along a focus axis direction within a focus range including work-piece surface height; (c) exposing a first preliminary image during image integration time while modulating the focus position within the focus range; and (d) processing the first preliminary image to remove blurred image contribution occurring in the focus range during the image integration time to provide an EDOF image having larger depth of field than that provided by the imaging system at a single focal position.</p> |
