| 摘要 |
An optical metrology device capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample is disclosed. The metrology device includes a first light source (110) that produces a first illumination line (122) on the sample (101). A scanning system (116) may be used to scan an illumination spot across the sample to form the illumination line. A detector (130) spectrally images the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source (140) may be used to produce a second illumination line (142) on the sample, where the detector spectrally images specular reflection of the broadband illumination along the second illumination line. The detector may also image scattered light from the first illumination line. The illumination lines may be scanned across the sample so that all positions on the sample may be measured. |
