| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide manufacturing method which reduces causes of misalignment between mirror surfaces and alignment marks and shortens manufacturing steps, to provide an optical waveguide manufactured using the manufacturing method, and to provide a photoelectric hybrid substrate including the optical waveguide. ! SOLUTION: A manufacturing method of an optical waveguide 1 includes; a preparation step for preparing an optical waveguide-forming member 1X having core sections 14 and cladding sections, and a mask 910 having light transmissive sections 911, 912; and a processing step for irradiating the optical waveguide-forming member 1X with laser light through the light transmissive sections 911 to form recesses or through holes, each having mirror surfaces that are positioned to obliquely cross an axis of the core section 14 or extension thereof as part of inner wall faces, and for irradiating the optical waveguide-forming member 1X with the laser light through the light tr |
